Optimal Discharge Parameters for Biomedical Surface Sterilization in Radiofrequency AR/O2 Plasma

Plasma parameters of radiofrequency discharge generated at low pressures in an argon-oxygen mixture addressed for biomedical surface sterilization have been optimized. Numerical results illustrate the density distributions different species and electron temperatures during electrical process. The current acting abnormal range decreases higher oxygen gas flow rates. temperature electrons drops with pressure while it rises by adding oxygen. Nevertheless, displays adverse trend, exhibited electron’s temperature. average particle reactive is enhanced Ar/O2 compared to He/O2, which ensures a better efficiency sterilizing bacteria than He/O2. impact addition on reveals raised atom reduction metastable atoms. A pronounced production atoms achieved frequency domains. This makes our findings promising leads optimal parameter discharges used being 30% ratio 0.3 Torr pressure.